mse 4003 exam 1

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1
AES
Auger electron spectroscopy
2
AFM
Atomic force microscopy
3
DTA
Differential thermal analysis
4
DSC
Differential scanning calorimetry
5
EBSD
Electron back-scatter diffraction
6
FIB
Focused ion beam
7
FTIR
Fourier transform infrared spectroscopy
8
NA
Numerical aperture
9
SEM
Scanning electron microscopy
10
SPM
Scanning probe microscopy
11
TEM
Transmission electron microscopy
12
VLM
Visible light microscopy
13
XRF
X-ray Fluorescence
14
XPS
X-ray photoelectron spectroscopy
15
XRD
X-ray diffraction
16
CLSM
Confocal laser scanning microscopy
17
AES
Auger electron spectroscopy
18
EDM and what is it for?
Electric discharge machine (cutting electrically conductive samples without mechanical stresses)
19
HDPE
High-density polyethylene
20
LDPE
Low-density polyethylene
21
PDF
Powder diffraction file
22
POE
Polyolefin elastomer
23
PMT and what does it do?
Photomultiplier tube (converts light into electrical signals)
24
SWL
Short wavelength limit
25
CCD
Charge-coupled device
26
ICDD
International Center of Diffraction Data
27
FEG
Field Emission Gun
28
FWHM
Full-width half-maximum
29
HRXRD
High-resolution X-ray diffraction
30
PEEK
Poly(ether-ether-ketone)
31
UHMWPE
Ultra-high molecular weight polyethylene
32
SAXS
Small-angle X-ray scattering
33
WAXD
Wide-angle X-ray diffraction
34
BF
Bright-field
35
DF
Dark-field
36
DCPD
Dicalcium phosphate dihydrate
37
FFT
Fast Fourier transform
38
HRTEM
High-resolution transmission electron microscopy
39
OCP
Octacalcium phosphate
40
PC
Polycarbonate
41
PBT
Polybutylene Terephthalate
42
SAD
Selected Area Diffraction
43
Image Characterization
2D spatial map of signal or intensity, as a function of position
44
Types of Images
Optical (uses lenses: VLM, TEM)
Scanned (using detectors: SEM, AFM)
45
Diffraction Characterization
Intensity due to interference as a function of angle
Uses COHERENT ELASTIC SCATTERING to reveal crystal structure
46
Limitations of Human Eye
Spectral sensitivity, signal sensitivity, and resolution
47
Spectroscopic Characterization
intensity as a function of "interaction"
Uses INCOHERENT, INELASTIC SCATTERING
48
250 mm
minimum distance of eye to focus
virtual images placed here via eyepieces
49
Resolution
the ability to distinguish closely-spaced features - controlled by diffraction effects (Rayleigh criterion)

Equation: 0.61(lambda)/NA, NA = n sin(alpha)
50
Resolution of VLM
Lambda limited to 400 nm minimum
NA upper limit = 1.6 with oil immersion lenses
Best R = 150 nm
51
Naked Eye Resolution
0.2 mm
Ideal magnification in VLM = 1000x
52
Why is there a limit to ideal magnification? What happens if you go higher?
Higher mag simply makes an image bigger, but at a certain point, it does not add any more visual information
53
Brightness
intensity of light
depends on (NA)^2 and M^2 in TRANSMISSION
depends on (NA)^2 and M^4 in REFLECTION
54
Contrast
Very important for detection (resolution isn't enough)
( I_obj - I_background ) / I_background
Visibility threshold varies with brightness
55
Detection
ability to distinguish an object present in an image; depends on CONTRAST
56
Depth of Field
Range of OBJECT heights over which the object APPEARS to be in focus (only one true focal point)

Small alpha = Large depth of field
Large alpha = Small Resolution
(Compromise between R and Df)

In VLM, Df ~= R (< 1 µm) - samples must be quite flat
57
Depth of Focus
Range of IMAGE plane positions over which the image APPEARS to be in focus, for a fixed object position

D_focus >> D_field usually

D_focus = (M^2)D_field
58
Lens Defects
Chromatic Aberration
Spherical Aberration
Astigmatism
Curvature of Field
59
Chromatic Aberration
Focal length varies with lambda; shorter lambda focused more strongly

Disk of confusion results
60
Spherical Aberration
Focal length varies with off-axis distance; off-axis rays focused more strongly

Disk of confusion results
61
Astigmatism
Focal length varies with polarization
Leads to elliptical disks of confusion
Hard to correct in VLM
62
Curvature of Field
Focal plane of the image is not truly flat
Most noticeable at high-magnification, short focal length lenses
63
Compensating for lens defects
1) Operate at disk of least confusion focal plane
2) Lower alpha and combine different lens types (to reduce CA and SA)
3) Use monochromatic light (to reduce CA)
4) No easy fix for astigmatism
64
Modern Compound Microscope system
Köhler system:
- Two illuminating lenses: collector and condenser
- Two imaging lenses: objective and eyepiece

Collector lens + field diaphragm = alters illuminated spot size on specimen, blocks stray reflections

Aperture diaphragm + condenser lens = controls alpha and NA, thus controls Df and R
65
Objective Lenses
Info on them: magnification, IOR, NA, application, lens-image distance, WD

Achromat = corrects SA for green light and CA for green and red light

Semiachromat (Fluorite) = expensive! corrects CA better

Apochromate = eliminates CA and corrects SA for red and green; highest NA
66
Eyepieces
Simply to magnify the primary image from the objective (usually 4x or 10x)
67
Optimizing Df in VLM
1) Close aperture diaphragm or use different lens so as to reduce NA
2) Lower magnification for a given NA
3) Use high-power eyepiece with low-power, high NA objective
4) Use longest lambda possible
68
Optimizing Resolution in VLM
1) Use highest NA possible in objective
2) Use high magnification
3) Use shortest lambda possible
4) Keep illumination centered
5) Adjust field and aperture diaphragms, adjust brightness
69
Types of Light Filters
Purpose = to control lambda and intensity

Neutral density (ND) = regulates intensity w/o changing lambda

Colored and interference filters = isolate specific colors or bands of wavelength

Heat filters = absorb IR radiation that causes specimen heating
70
Specimen Prep for VLM
Sectioning
Mounting
Grinding
Polishing
Etching
71
Sectioning
Abrasive cutting = common approach, with SiC, alumina, or diamond wheels/disks

EDM = electric discharge machine = cutting via spark erosion (good for electrically conductive materials; avoids mechanical stresses)

Microtomy = shaving thin slices using sharp glass or diamond knife (good for biological/polymer microscopy)
72
Mounting
Hot mounts = thermosetting plastics at high T and P
Cold mounts = epoxy or acrylic mixed with hardener (versatile!)
73
Grinding
removes sectioning damage
SiC papers with particles of different sizes
Grind from low to high grit, wash in between

Artifacts = scratches, structural disorder
74
Polishing
Coarse polishing = abrasives down to 3 µm
Fine polishing = abrasives down to 1 µm or even 0.25 µm (diamond); alumina slurries can get down to 0.05 µm

Artifacts = "hard" particle pull-out due to excessive pressure during polishing (comet-tail effect)
75
Etching
Selective chemical dissolution to reveal microstructure; yields topographical differences in reflectivity or brightness
76
Impact Factor
Total # of citations to published articles in past 2 years / total # of published articles in past 2 years
77
DOI
digital object identifier = digital handle used to identify and find objects/papers online
78
Human Eye Detection
Rods = function at lower ambient intensity; no color sensitivity
Cones = detect colors red, green, and blue in good illumination
ONLY SENSITIVE TO AMPLITUDE AND WAVELENGTH, NOT PHASE
79
Amplitude Contrast in VLM
BF = object evenly illuminated via annulus
DF = illumination by oblique light via central stop (enhances contrast in VLM)
80
Phase Contrast in VLM
Phase changes are converted into amplitude changes via interference of beams

- Uses a phase plate after objective to advance different parts of direct beam by fractions of a wavelength
- In conjunction with any sample phase interactions, constructive/destructive interference can occur and give contrast
81
Birefringence
Optically anisotropic materials = have different IORs in different directions

O-wave = ordinary wave (along direction with high n)
E-wave = extraordinary wave (along direction with low n)

Plane-polarized light in -> phase difference -> elliptically polarized light out
82
How is elliptically polarized light converted into detectable information?
A linear polarizer (crossed from the first) allows elliptically polarized light of different phase differences to form an analog range of amplitudes once filtered. The eye can detect these as usual
83
Nomarski DIC
Uses an optically anisotropic prism (Wollaston prism), for samples that are not birefringent themselves

Strong contrast from subtle features

**Prism splits the beam in two based on birefringence
**Difference in phase between the two beams after interacting with the specimen yields interference, elliptical polarization, and conversion into amplitude contrast upon detection

Can sometimes show twinning/dislocations too!
84
Fluorescence Microscopy
Fluorescence = when objects emit light of longer wavelength after being excited by shorter wavelengths

Dyes = fluorochromes needed usually
UV or blue monochromatic light source
**Dichroic mirror = reflects short wavelengths and transmits longer ones
*Exciter filter = selectively transmits a band of short wavelength (initial filter of system)
*Barrier filter = transmits fluorescent light only (final filter prior to imaging)
85
Confocal Laser Scanning Microscopy
- Laser beam focused as spot on specimen
- Scanning device moves beam in XY
- Pinhole aperture blocks stray reflected light
- 3D image obtained by stacks of 2D images
*Gives much better resolution in 3D than most techniques (0.2 µm)

Approach 1 = specimen scanning = best for lower resolution; stage moves

Approach 2 = laser scanning = mirrors rotate; MUCH harder to align
86
X-ray types
Bremsstrahlung and Characteristic
87
Bremsstrahlung radiation
Braking radiation:
- electrons decelerating give a range of X-ray photons emitted
- short wavelength limit (SWL) = due to an electron giving up all of its energy as one, high-E photon
88
Characteristic radiation
- electron transitions into core shell vacancies yield characteristic wavelengths (sharp peaks in X-ray spectrum)
89
Names of Characteristic Radiation
K, L, M, ... = termination level
alpha, beta, gamma, ... = # of levels dropped
1, 2, ... = in order of decreasing drop height within a degenerate state transition
90
Common X-ray targets
Cr, Fe, Mo, Cu (Cu Kalpha x-rays are most common)
91
X-Ray Filters
Selectively absorb certain X-ray wavelength ranges, to acquire a primarily monochromatic beam for XRD

- uses the concept of absorption edge in a materials absorption coefficient

e.g. Ni edge just so that Cu Kbeta rays absorbed and Cu Kalpha transmitted
92
XRD Theory
Bragg's law: n(lambda) = 2d_hkl*sin(theta)
(When constructive interference occurs)

Final X-ray amplitude depends on:
1) Angle = atomic scattering factor; large angles from beam axis give smaller amplitudes overall
2) Atomic scattering function = depends on electron wavefunction arrangement within atoms, and total X-ray ∆phase based on X-ray-electron diffraction
3) Unit-cell-wide diffraction = STRUCTURE FACTOR = sum of diffraction and ∆phase due to all atoms in unit cell
4) Bragg diffraction = constructive interference among all unit cells
93
Reciprocal Lattice
G-vectors for which R*G=2(pi)n
- R = lattice vectors between unit cells
- G = recip lattice vectors = ∆k for a given diffraction scenario

* In real space, G vectors plotted = the normal vector of the Bragg plane under discussion
94
Zone Axis
A crystallographic axis for which many planes intersect (usually a low-index direction i.e. 100)

- Diffraction pattern seen down zone-axis contains recip lattice points whose hkl values make G-vectors that are perpendicular to the zone axis direction
95
Ewald Sphere
- Imaginary sphere with radius (1/lambda)
- Center located at crystal being examined
- Incident beam = line through sphere center targeting the origin of k-space, located on the sphere surface
- Diffraction beam = line at angle 2(theta) from beam axis
** If diffraction beam/Ewald sphere hits a recip lattice point, Bragg conditions are satisfied for those hkl planes

Recip lattice moves with crystal rotation
Sphere moves with beam rotation
96
Short Lambda on Ewald Sphere
Flat Ewald sphere; many k-space lattice points intersected/visible on diffraction pattern
97
Polycrystalline XRD Pattern
No preferred orientation of grains = Debye ring-type diffraction pattern, where Ewald sphere points are smeared out in rings

Radii of rings + known lattice parameter = indexing of diffraction rings

** Equivalent to rotating the k-space lattice around its origin about the beam axis
98
How does scattering intensity in an atom compare to that of the constituent electrons?
Total atomic scattering intensity < sum of electron XRD intensities (due to some destructive interference between electrons once in an atom)
99
Systematic absences
Special hkl values that make the structure factor = 0, even when Bragg conditions would support the observation of a diffraction peak
100
Bragg-Brentano Geometry
Fixed incident beam, stage and detector rotate (2x speed for detector) on goniometer = physical circular track

Focusing circle = imaginary circle containing the source, specimen, and detector on the circumference

Soller slits = prevent beam divergence

NOT suitable for thin-film XRD; requires a parallel, monochromatic beam
101
XRD System aberrations
1) Axial divergence error - beam divergence when it hits specimen (irradiated parts of specimen not on focusing circle)
2) Flat specimen error - specimens are often rough (certain atomic planes not on focusing circle)
3) Specimen transparency - X-rays giving info about diffraction deeper in sample
102
How can parafocusing errors be minimized in XRD Bragg Brentano?
Specimen must remain tangentially tilted to the focusing circle
103
Sample Prep for XRD
Powder Diffractometry used for polycrystalline samples = allows for sampling of many grains

Problems that could arise:
1) Grinding = can cause strain, decomposition, contamination, amorphization, etc.
2) Irradiation = polymerization, decomposition, amorphization can result
3) Thermal issues = water loss, high T decomposition
104
Main Parameters in XRD Scan
Peak positions = given by 2(theta)
Peak intensities = given by relative diffraction strengths
Variation in intensity with 2(theta)
105
Choices of XRD parameters
2(theta) = usually 5-65˚

lambda = usually Cu K(alpha) since it can probe a wide range of typical interplanar spacings

Scan step = 0.02˚ per step (10-20 bins at FWHM of a peak)
- Too large = smooth weak peaks
- Too small = inaccurate peak shifts
106
XRD Distortions
Preferential orientation = relative changes in intensity; may make certain peaks invisible

Crystallite size = small grains can cause peak broadening; calculated via Scherrer equation
(due to incomplete destructive interference in non-Bragg planes for small grains)

Residual stress:
*Tension = lowers 2(theta)
*Compression = raises 2(theta)
- uniform strain = peak shifts
- non-uniform strain = peak broadening
107
XRD Applications
Crystal Phase Identification
- search and match XRD patterns in database against PDFs (powder diffraction files)

Lattice Parameter Determination
- small errors in sin(theta) give large errors in a
- Calculate a for several peaks, then extrapolate using various functions to cos^2(theta)=0 to find a0
108
Errors in Lattice Parameter Determination in XRD
Systematic = misalignment of instrument, beam divergence, absorption

Random = stochastic errors involved in peak observation
109
Quantitative XRD Measurement
- Intensity of peaks from a phase is proportional to the volume fraction of that phase (assumption)
- compared against external standard (pure component), internal standard (known phase mixtures)

- Powders not required since you use a single peak
110
Wide Angle X-Ray Diffraction (WAXD)
Traditional approach for single crystals
For a film/detector at D from sample, a diffraction spot at a radial distance Ri corresponds to Bragg angle:

(theta)_i = 1/2*arctan(Ri/D)
111
Small Angle X-Ray Diffraction (SAXD)
Modern approach with very sensitive detectors
- small angles correspond to large periodicities - used in polymers, proteins, etc.
112
TEM vs SEM image types
TEM = optical image
SEM = scanned image
113
TEM structure
Electron gun
2 condenser lenses
Specimen
Objective, intermediate, and projector lenses
Fluorescent screen/camera
114
Electron Sources
Thermionic guns = high temp allows electrons to escape work function
- Tungsten (short lasting)
- LaB6 (longer lasting, requires better vacuum and gentle handling)

Field Emission = electrons tunnel through work function barrier via electric field
- Thermal field emission (heat assists)
- Cold FE (at room temp)
* Needs very high vacuum, but very bright
115
TEM Specimen Prep
Pre-thinning:
- slice down to 1 mm thickness
- Hand or dimple grinding

Final thinning:
- reducing thickness to electron transparency
116
Final thinning methods for TEM
1) Electropolishing = for metals
- make the sample the anode in electrolytic cell
- depends on many environmental factors

2) Ion milling = for metals and ceramics
- sputtering atoms away via ion beam
- cooling with liquid N necessary

3) Ultramicrotomy = for polymers
- shave electron transparent slices with a diamondlass blade
- often use cryo-ultramicrotomy to help with rigidity issues
- transfer to 3 mm grid
*Main issues: tearing, wrinkling

4) Nanoparticulate specimens
- use support grids/films to image directly

5) Surface and Extraction Replication
- grind and polish bulk material to expose precipitates
- add coating material to which precipitates adhere
- bulk material removed; particulates isolated on film
117
Imaging Modes in TEM
Mass-Density Contrast
Diffraction Contrast
Phase Contrast
118
Mass-Density Contrast in TEM
For biology/polymer specimens
- INELASTIC scattering of electrons by atoms in specimen
- scattering amount proportional to mass-density in local region
* Depends on atomic #, thickness, density, aperture size, electron energy
119
Diffraction Contrast in TEM
Main image formation method
*Based on Bragg diffraction = COHERENT scattering
BF contrast generated when objective aperture excludes Bragg-diffracted electron beams
**Very sensitive to specimen tilting

- Focusing aperture on a diffraction spot other than main beam = DF imaging (only grains with that orientation/Bragg diffraction condition light up)
120
Selected Area Diffraction in TEM
Diffraction pattern from TEM obtained from a single crystal region
- BF imaging = aperture allows main beam
- DF imaging = aperture allows an off-axis diffracted beam only

*** Centered DF (tilt beam, don't translate aperture) is best because it prevents severe image distortions = SA, CA, astigmatism
121
Phase Contrast in TEM
**Allowing two or more Bragg-diffracted beams through objective aperture
- Interference AFTER the specimen creates contrast, as a result of the specimen interaction with the electrons
- interpretable structures from 2-beam phase contrast

Many-beam phase contrast:
- enhances resolution
- fringes and dots can correspond to planar/atomic spacings!
122
Basic Equation for Electron diffraction in TEM
From small angle approx of Bragg's law:

lambda*L=R*d
R = on-screen, off-axis distance of spot
L = specimen-to-screen distance
123
Disadvantages of SAD in TEM, compared to XRD
Low precision
Small angles only (<2˚)
Good at orientation measurement, NOT at lattice parameter determination
124
Kikuchi lines
Inelastic + elastic scattering of electrons in thicker TEM samples
- Inelastic scattering due to interactions with sample electrons; creates secondary source in all directions of electrons (further from beam axis, lower intensity though)
- Elastic scattering due to SOME of these electrons satisfying Bragg conditions and creating diffraction cones
- Kikuchi lines are planar slices of the larger diffraction cone edges

Closer line = darker = deficit
Further line = brighter = excess
**Come in parallel pairs

Used as a road map for tilting the specimen until a zone axis is found
125
Optical Paths in TEM
1) Diffraction mode
- SAD aperture above the intermediate lens at the "real space" IMAGING PLANE of the specimen rays

2) Imaging mode
- Objective aperture above the intermediate lens at the "k-space" BACK FOCAL PLANE of the specimen rays
126
3 Important features in TEM images
1) Thickness fringes = sample thickness changing continuously, causing wedge fringes

2) Bend contours = diffuse curved bands in TEM; due to physical bending in specimen causing some rotated planes to satisfy Bragg conditions (MOVE QUICKLY UPON TILTING)

3) Defects/dislocations - local distortions of planes near defects in TEM samples
- appear as short line segments (advantage of TEM is observing these!)
127
SEM mag, resolution, and Df power
Mag up to 1 million
R down to 10 nm
Df up to 1 mm at low mag
128
SEM Layout
Electron gun
2 condenser lenses and a spray aperture
Scan coils and magnification control
3rd condenser lens to demagnify beam
*Final aperture
Specimen, detector
129
How is magnification set in SEM?
By the ratio between scan size and on-screen pixel size!
130
Signal detection in SEM
BSEs:
- relatively elastic scattering of electrons at high angles off sample atoms
- best for elemental composition contrast
*Can escape from deeper
*Poorer resolution due to deeper, wider interaction volume

SEs:
- inelastic interactions with sample electrons, causing them to be ejected
- low energy electrons ejected (3-5 eV)
- main signal in SEM; topological contrast
*Only escape from near surface
*resolution close to probe diameter
131
SEM Detector?
Everhardt-Thornley:

- Faraday cage with scintillator inside = can be biased +250V to attract all electrons (majority are SEs) = SE mode
- Or, biased to -50V to repeal low energy SEs (BSE mode)
- Scintillator at high +voltage
- Light guide and photomultiplier tube
- Amplification up to 1 million times before screen display
132
SEM Probe Size/Diameter
- determined by final aperture diameter and working distance
133
How to attain minimal SEM Spot Size?
- Increase brightness
- Optimize alpha_final (too large of alpha can cause SA)
- Increase accelerating voltage to decrease lambda

** Part of how to obtain high-resolution in SEM
134
High-resolution in SEM
Minimal spot size AND good contrast (high probe current)
135
Rose Visibility Criterion
∆signal must be ≥ 5 times the noise level; ∆S/S = desired contrast
136
Dwell time
time to scan a frame / pixels per frame

larger dwell time = smaller MINIMUM probe current for a desired contrast (better conditions)
137
Topological Contrast in SEM
Regions of sample pointing towards detector will give larger (brighter) SE signals

Looks like surface with inclined optical illumination
(Can be misleading though)
138
Edge Effects in SEM
Electron probe hits an edge or protrusion and some of interaction volume escapes to give brighter signal
139
Compositional Contrast in SEM
**Probability of BSE escape increases with increasing atomic #
- due to ∆work function between materials & large nuclei back-scattering electrons

eta = backscattering coefficient = n_BSEs / n_incident electrons

BRIGHTER AREAS = HIGHER ATOMIC #
140
Operational Variables in SEM
Working Distance - Dw
Final Aperture Size - Rfap
Accelerating Voltage - V
141
Depth of Field in SEM
Larger with:
- Long Dw
- Small Rfap - reduces probe current and S/N ratio

!! Gives poorer resolution though
142
Accelerating Voltage in SEM
High V:
- lower lambda of electrons
- improves resolution via smaller probe size

Low V:
- decreases excitation volume
- improves resolution via less secondary excitations
- less beam/charging damage
143
SEM Contamination
Hydrocarbons decomposed under beam and leave carbon deposits (formed more quickly at high mag)
144
SEM Surface charging
causes image distortions and streaking
145
Preventing Surface Charging
Thin metal or carbon application via sputter coating or evaporation

- use metals when care only about surface topology since they're more conductive
146
Biological Sample Prep for SEM
Chemical fixation
Cryogenic fixation

Solvent, freeze, or critical point dehydration
147
BSE Orientation Contrast
Probability of BSE escape changes with orientation

*** At Bragg angles, fewer BSEs escape (dip in eta)
148
Electron Back-scattered diffraction
Kikuchi band formation from Bragg-scattered BSEs

- Much wider range of angles than TEM kikuchi formation (easier to find zone axes in field of view)
- Indexing done with Hough transform; via relative widths and orientations of the Kikuchi lines
149
Environmental SEM
Much higher pressures
Multiple pressure-limiting apertures; can be larger
Smaller Beam-gas path length
Can operate at higher pressures without as much scattering
150
Low-Vacuum SEM
Cheaper (only two vacuum pumps)
One pressure-limiting aperture
- must be small to avoid gas flow in high pressure differential
- limits rastering ability
Longer beam-gas path lengths (more chance of scattering)
151
ESEM Detector
GDD = Gas detection device
- electrons escaping from specimen collide with gas molecules, as they're attracted to a (+) biased beam-column exit cup
- cascade of electrons; SE signal amplified
- positive gas ions drift away from cup towards specimen; PREVENTS CHARGING
152
ESEM Applications
Non-conductive and hydrated samples
Dirty/contaminated samples
Phase transformations and environmental changes
153
Focused Ion Beam Modes
Milling = high ion current = sputtering away atoms
Deposition = low ion current = laying down metal atoms from a precursor gas (via gas injection system needle)
Imaging = very low current; ionization of sample leads to huge SE signal
- Strong orientation contrast, beam damage possible
154
Dual-Beam FIB-SEM benefits
Ion beam for milling/deposition
SEM for imaging/spectroscopy

- 2-in-1 instrument
- excellent for cutting/imaging cross-sections
- Great for site-specific TEM prep
- Serial-sectioning tomography
155
BGPL
Beam-gas path length
156
BSED
Back-scattered electron detector
157
CSEM
Conventional scanning electron microscopy
158
GFIS
Gas field ion source
159
LMIS
Liquid metal ion source
160
LV-SEM
Low vacuum scanning electron microscopy
161
MCP
Micro-channel plate
162
PLA
Pressure-limiting aperture
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